Probe Card
Advanced
Probe Card/M type
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MC Series
MEMS probe card created with MEMS (Micro Electro Mechanical Systems) and thin film multilayer wiring technology. Supports full wafer probing for 300mm wafers.
MC Series is a probe card technology suitable for DRAM and NAND flash memory devices. -
MT Series
MEMS probe card created with MEMS (Micro Electro Mechanical Systems) and thin film multilayer wiring technology. Supports fine-pitch area arrays by use of vertical MEMS probe. MT Series is a probe technology developed for flip chips with Cu pillar bumps and pads.
Advanced
Probe Card/V type
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VS Series
Vertical probe card with micro spring pins can support various attachment methods such as wire transformer, MLO, MLC and direct attachment.
VS Series is a probe card technology recommended for flip chip, area array, and wafer-level CSP. -
VC Series
Vertical probe card with buckling structure. Supports 12-inch size wafer batch contact.
VC Series is a probe card technology designed for high-parallelism testing of memory and logic devices -
VT Series
Cantilever probe cards structurally restrict multi-DUT testing for devices with peripheral pads. VT Series uses a vertical structure, which solves DUT restrictions and improves electrical properties.
VT Series is a probe card technology designed for multi-DUT testing of logic devices with fine-pitch peripheral pads. -
VE Series
A hybrid probe card structure combining vertical and cantilever probe card features.
VE Series is a probe card technology developed for high-parallelism testing of CMOS imaging sensors with openings for light source.
Cantilever
Probe Card/C type
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CE Series
Cantilever probe card with cantilever probe wires attached to epoxy ring.
CE Series is a probe card technology suitable for testing various types of logic IC such as high current automobile devices and application processors from transistor devices.